| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge detection method and a detector capable of accurately detecting a boundary position between a detecting body and a shield body even if the transparent or translucent detecting body is in a position shifted from a specific detection position. SOLUTION: When the edge position of the detecting body S is detected by photographing the image of the detecting body S illuminated with transmitting diffusion light with a linear image sensor 1 by way of an optical system provided with a lens 4 and a diaphragm 5, the light quantity variation at the boundary of the image of the detecting body S photographed with the linear image sensor 1 is approximated with a specific approximation curve function, and the edge position of the detecting body S is detected by using the specific approximation curve function and obtaining with interpolation operation of the position having a specific light quantity on the image. COPYRIGHT: (C)2006,JPO&NCIPI
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