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发明名称
METHOD AND ARRAY FOR DETERMINING THE FOCAL POSITION DURING IMAGING OF A SAMPLE
摘要
申请公布号
EP1618426(A1)
申请公布日期
2006.01.25
申请号
EP20040729615
申请日期
2004.04.27
申请人
CARL ZEISS JENA GMBH
发明人
BUBLITZ, DANIEL;GRAEFE, DIETER;WESTPHAL, PETER
分类号
G02B7/32;G02B21/24;G03F7/207;(IPC1-7):G02B21/24;G03F7/20;G03F9/00
主分类号
G02B7/32
代理机构
代理人
主权项
地址
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