| 摘要 |
PROBLEM TO BE SOLVED: To stabilize a device characteristics, and to improve the crystallinity of CsI. SOLUTION: The device comprises a sensor substrate, on which a plurality of pixels, consisting of a photoelectric conversion element and a switching element are arranged; a protective layer 14 which covers the plurality of the pixels is arranged on a sensor substrate; a smoothing layer 15 which has a flat surface is arranged, on the surface of the protective layer on the plurality of the pixels; a scintillator layer 16, consisting of a column crystal, is arranged on the surface of the smoothing layer by an evaporation, in the scintillator layer, impinging radiation is converted into a detectable light, using the photoelectric conversion element; a light-reflecting film 17 for covering the scintillator layer and the smoothing layer at least, is arranged on the sensor substrate and the scintillator layer. COPYRIGHT: (C)2006,JPO&NCIPI
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