Polymerizable fluorinated ester, manufacturing method, polymer, photoresist composition and patterning process

摘要

Polymerizable fluorinated ester compounds having formula (1) or (2) are novel wherein R 1 is H, methyl or trifluoromethyl, R 2 is a divalent hydrocarbon group, R 3 is H or a monovalent hydrocarbon group, or R 2 and R 3 , taken together, may form a ring, R 4 is H, OH or a monovalent hydrocarbon group, and R 5 is an acid labile group. They are most useful as monomers to produce poly