发明名称 System and method for improving accuracy in a speckle-based image correlation displacement sensor
摘要 A system and method for improving the accuracy of a speckle-based image correlation displacement sensor provides ultra-high accuracy by ensuring that, in the absence of motion, the speckle image does not vary over time. In one embodiment, the speckle image is stabilized by reducing or compensating for laser diode wavelength changes. Various methods for stabilizing the wavelength include thermoelectric temperature control, measuring and correcting the wavelength by any suitable means, or providing a specific wavelength of light feedback from an external grating. Image stabilization may also be accomplished by monitoring the warm-up process of the system. Once the system is determined to have completed the warm-up process, an indicator is provided to the user to indicate that the system is ready for use. Sensor geometric configurations that reduce or eliminate wavelength-related errors are also disclosed.
申请公布号 EP1617173(A2) 申请公布日期 2006.01.18
申请号 EP20050014677 申请日期 2005.07.06
申请人 MITUTOYO CORPORATION 发明人 JONES, BENJAMIN K.;TOBIASON, JOSEPH D.;MASRELIEZ, KARL G.;NAHUM, MICHAEL M.
分类号 G01B9/02 主分类号 G01B9/02
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