| 摘要 |
A method for treating an organosiloxane coating film which has a first process of transporting a substrate (W) provided with a coating film of a chemical fluid based on a polysiloxane havng an organic functional group into a reaction chamber (2), and a second process of subjecting the substrate (W) to the heat treatment in the reaction chamber (2) to heat the coating film, wherein the second process comprises a temperature setting step of heating the inside of the reaction chamber (2) to a treatment temperature, and a supply step of supplying a heating gas to the reaction chamber (2) having the treatment temperature, while activating the heating gas in a gas activation section (14).
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