摘要 |
PROBLEM TO BE SOLVED: To provide an optical pickup inspection apparatus and an inspection method of an optical pickup in which an astigmatic difference of an optical pickup caused by defocus can be discriminated accurately. SOLUTION: The optical pickup inspection apparatus for inspecting a spot property of light emitted from the optical pickup is provided with a condensing part condensing light S and having a condensing plane vertical to an optical axis, a measuring means obtaining respectively spot diameters Dx, Dy of the light S condensed on the condensing plane for two axial directions X and Y, and a movement means performing defocus in the direction of the optical axis. The spot property is inspected based on measured results Dx, Dy of the measuring means when defocus is performed at each of a plurality of points by the movement means. COPYRIGHT: (C)2006,JPO&NCIPI
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