| 摘要 |
PROBLEM TO BE SOLVED: To control suck back amount with high precision without being affected by unevenness of dimensional precision of individual parts. SOLUTION: This suck back valve is provided with an on/off valve 26, a suck back mechanism 28 including a second piston 80 connected with a second diaphragm 88 and displacing integrally and a second spring member 104 engaged with the second piston 80, a load sensor 102 for detecting load given by springing force of the second spring member 104 by corresponding to supplied pilot pressure, and a first control unit and a second control unit for detecting load before displacement and after displacement of the second diaphragm 88 by the load sensor 102 and computing displacement amount of the second diaphragm 88 based on deviation of detected load. COPYRIGHT: (C)2006,JPO&NCIPI
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