| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect the location of foreign matter in a coordinate system with reference to a substrate to be inspected at all times even in the case that the substrate to be inspected can not be mounted onto an inspection stage with satisfactory reproducibility. <P>SOLUTION: This foreign matter inspection apparatus comprises a noncontact type location detecting means 11 for detecting the locations of a plurality of different parts in outer circumferential edges 1b and 1c of the substrate to be inspected 1 in a stage coordinate system (X, Y) with reference to the stage St; a transformation constant computing means Pa for creating a substrate coordinate system (x, y) with reference to the substrate to be inspected 1 on the basis of each detected location of the outer circumferential edges 1b an 1c and determining a coordinate transformation constant for transforming the location of each point on the substrate to be inspected 1 from the stage coordinate system to the substrate coordinate system; a light source part 2 for irradiating the substrate to be inspected 1 with a laser beam L; a detecting part 7 for detecting reflected scattering light R caused by the irradiation of the laser beam L; and a foreign matter location detecting means Pb for detecting the location (Xa<SB>1</SB>, Ya<SB>1</SB>) of foreign matter in the stage coordinate system in the surface of the substrate to be inspected 1 by analyzing the reflected scattering light R and computing the location (xa<SB>1</SB>, ya<SB>1</SB>) of the foreign matter in the substrate coordinate system through the use of the coordinate transformation constant. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
