发明名称 POWDER FEEDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a powder feeding device preventing coagulation of the powder or loosening the coagulated powder to an original particle shape and capable of stably feeding the powder in the particle state. SOLUTION: An air nozzle 3 is provided on a bottom part 2b of a hopper 2 for storing the powder P and a discharge port 2d is provided on an upper part 2c of the hopper 2. A compressor 4 for feeding compressed air to the air nozzle 3 is provided, and the air nozzle 3 is arranged such that the powder P is rotated in the hopper 2 by the compressed are injected from the air nozzle 3 and is discharged from the discharge port 2d while being stirred. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006007003(A) 申请公布日期 2006.01.12
申请号 JP20040183885 申请日期 2004.06.22
申请人 CANON SEMICONDUCTOR EQUIPMENT INC 发明人 ISHIDA EIICHIRO
分类号 B05C19/06 主分类号 B05C19/06
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