摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a separator for a fuel cell capable of suppressing a contact resistance small and preventing distortion of the separator. <P>SOLUTION: The manufacturing method of the separator for a fuel cell consists of a pressing process obtaining a separator material 51 equipped with a groove 24 for introducing gas or the like by pressing and forming a titanium plate material 61, a sputtering process eliminating an oxidated film 66 from a surface 21 by arranging the separator material 51 in a reducing atmosphere including hydrogen gas 56 and putting hydrogen ions 56 on the surface 21 of the separator material 51 with a sputtering treatment, and a plasma nitriding process obtaining a separator 13 by arranging the separator material 51 with the oxide film 66 eliminated in a nitriding atmosphere including nitrogen gas 55 to be heated at 350 to 500 °C and forming a titanium nitride film 71 on the surface 21 of the separator material 51 with a plasma nitriding treatment. <P>COPYRIGHT: (C)2006,JPO&NCIPI |