PLASMA PROCESS APPARATUS WHICH COMPRISES PLASMA ELECTRODE HAVING SEVERAL PROTRUSIONS,申请号KR20040052529-传众专利搜索

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发明名称	PLASMA PROCESS APPARATUS WHICH COMPRISES PLASMA ELECTRODE HAVING SEVERAL PROTRUSIONS
摘要
申请公布号	KR20060003591(A)	申请公布日期	2006.01.11
申请号	KR20040052529	申请日期	2004.07.07
申请人	JUSUNG ENGINEERING CO., LTD.	发明人	HA, JUNG MIN;PARK, HAE JIN
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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