PROBING DEVICE

摘要

A probing device which applies, while causing a cantilever (10) provided with (a probe (10a)) disposed opposite to the surface of a sample (20) to perform self-excited oscillation at a predetermined frequency, excitation light intermittently to the sample (20) to observe the sample (20), wherein the excitation light is applied to the sample (20) at a predetermined timing when the distance between the probe (10a) and the sample (20) is not greater than a predetermined distance.