| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate carrying device capable of reliably carrying out a substrate from an electrostatic chuck, when suspending the substrate from a stage device for retaining. <P>SOLUTION: The substrate carrying device comprises a chuck 2 that is arranged on a stage 12 and has a chucking surface for retaining the substrate 5 downward; a carrying arm 1 for carrying in and out the substrate 5 at the lower side of the chuck 2; a substrate supporting section 3 having a support piece 14C for supporting the substrate 5 at the lower side of the chucking surface; and a drive mechanism 4 for elevating the substrate support section 3. The substrate support section 3 scoops up the substrate 5 from the carrying arm 1 in carry-in by the support piece 14C for coming into contact with the chucking surface, supports the substrate 5 departing from the chuck 2 in carry-out by the support piece 14C for passing to the carrying arm 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
