| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas treatment method capable of suppressing electric field intensity in order to cause dielectric breakdown, and keeping the volume of gas circulating space wide. <P>SOLUTION: In the method for treating gas a to be treated containing a treating object substance by generating non-equilibrium plasma in the gas circulating space 10, non-equilibrium plasma is generated by two wire-like high voltage application electrodes 12a, 12b which are disposed with a space in the vertical direction to opposing faces of plate-like grounding electrodes 11a, 11b, between the facing grounding electrodes 11a, 11b disposed in parallel to each other and forming the space 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
