| 摘要 |
PROBLEM TO BE SOLVED: To easily and reliably allow a pair of coils formed opposingly on both the surfaces of an insulating substrate to conduct electricity without using soldering regarding a method for manufacturing the electromagnetic coil plate that uses charged particle rays, such as electron rays and ions, and is suitable for a charged particle beam device, the electromagnetic coil plate, a toroidal type coil structure, and a charged particle beam projection aligner. SOLUTION: The method for manufacturing the electromagnetic coil plate comprises a through hole formation process for forming a through hole at a position that becomes the interconnection section of the insulating substrate; a conductive film formation process for forming a conductive film on both the surfaces of the insulating substrate and at both the sides of the inner surface of the through hole; a conductive film continuity process for allowing a conductive film on both the surfaces of the insulating substrate to conduct electricity by forcing a conductive member into the thorough hole; and a coil formation process for forming coils opposingly via the conductive film on both the surfaces of the insulating substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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