| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a machining method by a laser suited to microfabrication for realizing devices requiring the increase in performance, high functionalization, miniaturization, fining and integration. <P>SOLUTION: A plurality of masks 2a, 2b, 2c are arranged on the surface of a work 1, and thereafter, while scanning a laser 3, it is applied to the surfaces of masks 2a, 2b, thus the masks 2a, 2b are removed by the laser 3, and surface working of the work 1 by the laser 3 is progressed from the removed parts. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
