发明名称 RF metrology characterization for field installation and serviceability for the plasma processing industry
摘要 A system for field substitution of components of a RF metrology system. The system includes a sensor/cable combination and an analysis unit. Parameters of the RF metrology system are determined prior to placing the RF metrology system in the field. From these parameters, either component, the cable/sensor combination or the analysis module, may be substituted in the field by recalibrating the system for the substituted unit. Such recalibration is carried out utilizing the parameters determined prior to placing the RF metrology system in the field.
申请公布号 US6983215(B2) 申请公布日期 2006.01.03
申请号 US20030727081 申请日期 2003.12.02
申请人 MKS INSTRUMENTS, INC. 发明人 COUMOU DAVID J.;WEATHERELL CLIFFORD C.;KIRK MICHAEL L.;NASMAN KEVIN
分类号 G01R35/00;H01J37/32 主分类号 G01R35/00
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