| 摘要 |
In a programmable power supply used in a semiconductor test apparatus, high-speed switching of a large current in a current rage or an output relay is enabled. In a MOSFET drive circuit 22 of a switch portion 20 provided in a programmable power supply 10 of a semiconductor test apparatus 1, a capacitor portion 22 - 12 is charged with electric charges by a current from a light receiving portion 22 - 12 of a light insulating element 22 - 1. When an SWA is turned on (SWB is turned off) by changeover of the analog switch portion 22 - 3, a gate of each MOSFET in the MOSFET portion 21 is charged with the electric charges stored in the capacitor portion 22 - 12, and enters an ON state. On the other hand, when the SWB of the analog switch portion 22 - 3 is turned on (SWA is turned off), the gate of the MOSFET is discharged.
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