发明名称 |
Liquid delivery system |
摘要 |
The present invention is a method for delivering liquid that minimizes the formation of microbubbles in the liquid, and a system for the same. The method entails supplying liquid from a fluid container into a flow path. The liquid is delivered through the flow path to a downstream process while maintaining the liquid at a pressure that inhibits formation of microbubbles in the liquid.
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申请公布号 |
US2005279207(A1) |
申请公布日期 |
2005.12.22 |
申请号 |
US20040869238 |
申请日期 |
2004.06.16 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
O'DOUGHERTY KEVIN T.;ANDREWS ROBERT E.;TITUS JOHN |
分类号 |
B67D7/72;B01D19/00;B01D19/02;(IPC1-7):B01D19/00 |
主分类号 |
B67D7/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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