发明名称 Liquid delivery system
摘要 The present invention is a method for delivering liquid that minimizes the formation of microbubbles in the liquid, and a system for the same. The method entails supplying liquid from a fluid container into a flow path. The liquid is delivered through the flow path to a downstream process while maintaining the liquid at a pressure that inhibits formation of microbubbles in the liquid.
申请公布号 US2005279207(A1) 申请公布日期 2005.12.22
申请号 US20040869238 申请日期 2004.06.16
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 O'DOUGHERTY KEVIN T.;ANDREWS ROBERT E.;TITUS JOHN
分类号 B67D7/72;B01D19/00;B01D19/02;(IPC1-7):B01D19/00 主分类号 B67D7/72
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