| 摘要 |
The programmable reflection mask, with a matrix of micro-mirror pixel cells to modulate a light beam, has a mirror element (41) at each pixel cell. The reverse side of the cell has a control unit with a control electrode (44), a photo element (46) and an amplifier (47). The matrix control circuit addresses the pixel cell control units individually by optical signals. The signals are received by the photo element, to be converted into electrical signals for the control electrode. A hollow zone is between the mirror and the substrate (42) with support stubs (43) to secure the mirrors. |
