RESONANT CHAMBER APPLICATOR FOR REMOTE PLASMA SOURCE,申请号KR19980007013-传众专利搜索

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发明名称	RESONANT CHAMBER APPLICATOR FOR REMOTE PLASMA SOURCE
摘要
申请公布号	KR100526593(B1)	申请公布日期	2005.12.21
申请号	KR19980007013	申请日期	1998.03.04
申请人		发明人
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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