| 摘要 |
PROBLEM TO BE SOLVED: To easily diagnose the status of a burn-in device for protecting the burn-in systems using a heater. SOLUTION: In the method for diagnosing the state of burn-in device performing the burn-in test, while performing temperature adjustment of DUT32 by contacting a heater 62 and a PT sensor 63 to various kinds of the DUT32 performing the burn-in test concerned, respectively, and by controlling the electric power of the heater 62 consumed during the period of burn-in test, when the DUT32, the heater 62, and the PT sensor 63 are in noncontacting state, the temperatures of a temperature control block 61, with which the coolant makes contact is detected by the PT sensor 63, in addition to placing of the heater 62 and the PT sensor 63, and finally, whether the PT sensor 63 is normal can be diagnosed, based on this sensing result. COPYRIGHT: (C)2006,JPO&NCIPI
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