PROTECTIVE COVER FOR LAMP, SET INCLUDING LAMP AND PROTECTIVE COVER, METHOD OF INSTALLING SOURCE IN LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a protective cover for a discharge lamp usable in a lot of installation forms, and removable after installing the discharge lamp in a lot of existing arrangements.

SOLUTION: This protective cover for a lamp is soft and formed of a material that has tensile strength so that the protective cover is impermeable to fragments generated from the lamp when the lamp breaks when covered by the protective cover. The protective cover is used to install the discharge lamp in a light source and removed from the lamp after installing the lamp.

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