| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition system by which a material for vapor deposition housed in a crucible is heated and melted with high efficiency and the adjustment to suppress melting of the crucible can be easily and surely executed. SOLUTION: The vapor deposition system 10 is equipped with the crucible 11 in which the material for vapor deposition is housed and a water cooled hearth 13 which holds the crucible 11 and in which a cooling water path 12 is formed, and is constituted to evaporate the material for vapor deposition by heating and melting. The crucible 11 is held by a fastener to the hearth 13 separably interposing a graphite sheet 14 between them. COPYRIGHT: (C)2006,JPO&NCIPI
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