| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette for a substrate and an arm for carrying the substrate equipped with a structure capable of suppressing an increase in the weight of the cassette for the substrate, and equipped with a structure capable of suppressing an increase in the bending of the substrate and improving the number of stored sheets of the substrate. SOLUTION: A supporting frame 160B is provided approximately in the central region of a linear supporting member 170, and the linear supporting member 170 is provided so as to project toward the front side to the supporting frame 160B. In addition, two linear supporting members 170 and 170 are made as a group supporting member 170A, and the arm 200 for carrying with a supporting arm 203 which can be inserted between the linear supporting members 170 and 170, is provided. COPYRIGHT: (C)2006,JPO&NCIPI
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