发明名称 |
Method of varying dimensions of a substrate during nano-scale manufacturing |
摘要 |
The present invention is directed toward a method to vary dimensions of a substrate supported by a chuck. The method includes applying compressive forces to the substrate with the actuator assembly while facilitating movement of the actuator assembly with respect to the substrate to minimize reactive forces generated in response to the compressive forces being sensed by the chuck.
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申请公布号 |
US2005269745(A1) |
申请公布日期 |
2005.12.08 |
申请号 |
US20050142834 |
申请日期 |
2005.06.01 |
申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
CHERALA ANSHUMAN;CHOI BYUNG-JIN;NIMMAKAYALA PAWAN K.;MEISSL MARIO J.;SREENIVASAN SIDLGATA V. |
分类号 |
B29C43/02;B81C99/00;G03B27/58;G03F7/00;(IPC1-7):B29C43/02 |
主分类号 |
B29C43/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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