| 摘要 |
A light illuminating apparatus used for a laser annealing apparatus includes a first light splitting unit ( 16 ) and a second light splitting unit ( 20 ) for splitting a sole laser beam into n laser beams, and a synthesis unit ( 21 ) for synthesizing an m'th laser beam, radiated from the first light splitting unit ( 16 ), and an m'th laser beam radiated from the second light splitting unit ( 20 ), to each other, where m is an integer not less than 1 and not larger than n. The first light splitting unit ( 16 ) and the second light splitting unit ( 20 ) are formed by the same optical components and are arrayed inverted with respect to each other.
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