METHOD FOR PRODUCING SOLID ELEMENT PLASMA AND ITS PLASMA SOURCE

摘要

There is provided a method for producing a solid element plasma from a solid lump and a plasma source used in the method. The method of the present invention comprises colliding a solid lump with accelerated particles or lasers to detach solid atoms from the solid lump within a first chamber inside which sputtering of solid atoms is performed, directing the solid atoms to a second chamber inside which plasma discharge is performed, applying a voltage to the second chamber to produce a plasma of solid atoms through plasma discharge, and contacting the plasma of solid atoms to a target to be treated. The present invention avoids problems caused from impurities and poisonous gases of conventional systems adopting a solid element-containing gas as a source of solid element.