发明名称 |
Micro-electromechanical integrated circuit device for fluid ejection |
摘要 |
A micro-electromechanical integrated circuit device includes a substrate that defines a plurality of fluid inlet channels. Drive circuitry is positioned on the substrate. A plurality of fixed nozzle chamber walls is positioned on the substrate about respective fluid inlet channels. A plurality of movable nozzle chamber structures is positioned over respective nozzle chamber walls so that nozzle chambers are defined by the nozzle chamber walls and the nozzle chamber structures. The nozzle chambers are in fluid communication with respective fluid inlet channels and the nozzle chamber structures each define a fluid ejection port. The device includes a plurality of elongate actuators. Each elongate actuator is fast at one end with the substrate to receive electrical signals from the drive circuitry and fast at an opposite end with a respective nozzle chamber structure so that, on receipt of an electrical signal, the actuators are operable to displace the movable nozzle chamber structures towards and away from the substrate so that fluid is ejected from the fluid ejection ports.
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申请公布号 |
US2005270326(A1) |
申请公布日期 |
2005.12.08 |
申请号 |
US20050202344 |
申请日期 |
2005.08.12 |
申请人 |
SILVERBROOK RESEARCH PTY LTD |
发明人 |
SILVERBROOK KIA |
分类号 |
B41J2/175;B41J2/01;B41J2/14;B41J2/16;B41J2/165;G11B7/0045;G11B7/125;(IPC1-7):B41J2/165;B41J2/04 |
主分类号 |
B41J2/175 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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