| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming an optical waveguide structure which makes it possible to manufacture an optical waveguide having desired waveguide characteristics with a simple method without using a high-cost manufacturing process. SOLUTION: In the manufacturing method of the optical waveguide structure, after a particle layer 12 having a packing ratioη<SB>1</SB>, and an effective refractive index n<SB>ef-1</SB>is formed by depositing a plurality of particles 11 on a substrate 10, an optical waveguide 13 which is held between the particle layer 12 and the particle layer 12 and which has a packing ratioη<SB>LG</SB>(provided,η<SB>1</SB><η<SB>LG</SB><1) and an effective refrative index n<SB>ef-LG</SB>(provided, n<SB>ef-LG</SB>>n<SB>ef-1</SB>) is formed by heating and cooling a part of the particle layer 12 in band shape. COPYRIGHT: (C)2006,JPO&NCIPI |
