发明名称 |
Linear motor, stage apparatus, exposure apparatus, and device manufacturing method |
摘要 |
Outflow of heat generated by a linear motor to the outside is suppressed. A linear motor according to the present invention is a linear motor used in a vacuum atmosphere, including a stator, a movable element movable relative to the stator, and a metal film formed on the surface of at least one of the stator and the movable element. This decreases the emissivity and reduces the outflow of heat by radiation from the linear motor.
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申请公布号 |
US6972499(B2) |
申请公布日期 |
2005.12.06 |
申请号 |
US20020068841 |
申请日期 |
2002.02.11 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
EMOTO KEIJI |
分类号 |
H01L21/027;H02K9/19;H02K9/22;H02K41/02;H02K41/03;(IPC1-7):H02K41/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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