| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel technique which can realize uniform and good firing or the like when microminiature parts such as a multilayer ceramic capacitor are manufactured, additionally, with significantly improved yield as compared with conventional techniques, and can provide a product excellent in economical efficiency. <P>SOLUTION: A ceramics cover to be used, in a heat treatment step or firing step to be carried out when microminiature parts are manufactured, in the state of covering a object to be fired on a setter, comprising a plate part comprising a ceramics sintered body having a flat surface having a plurality of through holes provided therein and a convex part comprising a ceramics sintered compact provided near the outer periphery of either surface of the plate part, wherein, when arranged on the setter, a gap having substantially the same interval is formed between the flat surface of the plate part and a surface on which the object to be fired is loaded. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
