METHOD OF MODIFYING NANOTUBE AND PROBE FOR SCANNING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To modify a nanotube by implanting ions into a prescribed region of the nanotube and to provide a modified probe for a scanning microscope. SOLUTION: The method of modifying the nanotube is a method for changing the physical and chemical properties of the nanotube by irradiating a desired region of the nanotube with converged ion beam to implant ions. The nanotube is an ordinary nanotube or a nanotube constituting the probe. Concretely, the probe is the probe 20 for the scanning microscope and the nanotube 12 is a nanotube probe fixed to a cantilever 4 and the nanotube probe is modified. The kind of ion is fluorine, boron, gallium or phosphorus. The probe 20 for the scanning microscope in which the tip of the nanotube probe is modified by the implantation of the ions is provided. COPYRIGHT: (C)2006,JPO&NCIPI