Board inspection apparatus and method

摘要

First and second inspection stages 2 and 3 are rotatably configured and provided with four A-side inspection suction tables 22 and four B-side inspection suction tables 32 . Distances between A- and B-side inspection suction tables 22 and 32 and their corresponding rotary shaft are changed by extension/contraction operations of air cylinders 23 and 33 . A board S in a board supply section 7 is sucked and fixed onto an A-side inspection suction table 22 , and passed to the second inspection stage 3 after an image of the A-side thereof is captured by an A-side inspection head 4 . The board S is sucked and fixed onto the B-side inspection suction table 32 , and ejected to a board receiving section 8 after an image of the B-side thereof is captured by a B-side inspection head 5 . A board inspection apparatus 1 performs the above processes in parallel.