TEST APPARATUS

摘要

A device (10) for shear testing of very small protrusions of an electrical semi-conductor device includes a sensor (30) for detecting surface contact of a shear test tool (15). The lateral shear force transducer is also used to detect scrubbing forces as the tool is reciprocated on the substrate, so as to give accurate surface contact sensing of non-rigid substrates. After contact sensing, the test tool is stepped back to ensure the shear test is performed without dragging of the tool on the substrate.