发明名称 SUBSTRATE STORAGE CONTAINER AND METHOD OF POSITIONING THE CONTAINER
摘要 <p>A substrate storage container enabling the proper positioning thereof even when the container is mounted on an apparatus with the cover body side of a container body tilted downward to prevent troubles from occurring in operations after thereafter and a method of positioning the container. The container comprises the container body (1) in which a plurality of precise substrates are orderly stored, the cover body opening/closing the opened front face of the container body (1), and a plurality of positioning bodies (40) orderly installed at the bottom part of the container body (1). Each positioning body (40) is formed in a recessed part of a pair of parallel ribs (2) formed on the bottom face of the container body (1) and the inner surface (9) of the curved part (8) of a track (6) formed on a bottom plate (4). The inner surface (9) of the track (6) is tilted from the upper side to the lower side to be gradually diverged linearly, and the upper end parts of the inner surface (9) are formed by extending to opposed areas (2a) positioned in the clearances thereof from the lower end parts of the pair of parallel ribs (2).</p>
申请公布号 WO2005112107(A1) 申请公布日期 2005.11.24
申请号 WO2005JP07434 申请日期 2005.04.19
申请人 SHIN-ETSU POLYMER CO., LTD.;SUMI, ATSUSHI 发明人 SUMI, ATSUSHI
分类号 B65D85/86;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D85/86
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