| 发明名称 |
LITHOGRAPHIC APPARATUS, ARTICLE SUPPORT MEMBER AND METHOD THEREFOR |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lithographic apparatus, an article support member and a method of manufacturing the article support member. <P>SOLUTION: The lithographic apparatus comprises a lighting system for offering a projection radiation beam, the article support member for supporting on an article support an article to be arranged on a beam path of the projection radiation beam, and a clamp for offering a clamped pressure for clamping the article to the article support during projection. The article support member is provided with a section which is trimmed for locally adjusting the clamped pressure. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2005328045(A) |
申请公布日期 |
2005.11.24 |
| 申请号 |
JP20050130909 |
申请日期 |
2005.04.28 |
| 申请人 |
ASML NETHERLANDS BV |
发明人 |
ZAAL KOEN JACOBUS JOHANNES MARIA;VAN MEER ASCHWIN LODEWIJK HENDRICUS JOHANNES;OTTENS JOOST JEROEN |
| 分类号 |
H01L21/683;G03B27/62;G03F7/20;H01L21/027;H01L21/68 |
主分类号 |
H01L21/683 |
| 代理机构 |
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