| 发明名称 |
Microfabricated miniature grids |
| 摘要 |
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
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| 申请公布号 |
US2005258514(A1) |
申请公布日期 |
2005.11.24 |
| 申请号 |
US20050124424 |
申请日期 |
2005.05.06 |
| 申请人 |
UNIVERSITY OF MAINE |
发明人 |
SMITH ROSEMARY;COLLINS SCOTT;FREDERICK BRIAN G.;LEGORE LAWRENCE J. |
| 分类号 |
H01J9/14;H01J49/06;H01L21/46;H01L23/34;(IPC1-7):H01L21/46 |
主分类号 |
H01J9/14 |
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