| 发明名称 |
Hybrid optical multi-axis beam steering apparatus |
| 摘要 |
An apparatus for precisely steering a beam of light by making use of a hybrid inter optical alignment that occurs when a beam steering mechanism is micro-machined with respect to a crystallographic orientation of a substrate.
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| 申请公布号 |
US2005258133(A9) |
申请公布日期 |
2005.11.24 |
| 申请号 |
US20020223078 |
申请日期 |
2002.08.16 |
| 申请人 |
MAYNARD RONALD S |
发明人 |
MAYNARD RONALD S. |
| 分类号 |
G02B6/12;G02B6/35;G02B6/36;G02B6/42;G02B26/08;G02B26/10;G11B7/085;(IPC1-7):C23F1/00 |
主分类号 |
G02B6/12 |
| 代理机构 |
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