| 摘要 |
PROBLEM TO BE SOLVED: To finely measure expanded structure, in particular, line structure, with a reduced measuring error, in a measuring instrument for inspecting an object optically and an operation method for the measuring instrument. SOLUTION: This measuring instrument is provided with means 14, 15 for imparting transition characteristics of continuous monotone functions to intensities of lights from light sources 6, 13, within a pupil face of an image focusing optical system 9 or an irradiation optical system 8, or within a plane of irradiation optical paths 4, 5 conjugated thereto or an image focusing optical path 11. COPYRIGHT: (C)2006,JPO&NCIPI
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