发明名称 Purgeable container for low vapor pressure chemicals
摘要 A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.
申请公布号 US6966348(B2) 申请公布日期 2005.11.22
申请号 US20030669942 申请日期 2003.09.24
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 STEIDL THOMAS ANDREW;VIVANCO GILDARDO;BIRTCHER CHARLES MICHAEL
分类号 B01J4/00;B08B9/00;B67D99/00;C23C16/44;C23C16/455;F16K11/10;F17C13/04;H01L21/02;H01L21/205;H01L21/304;(IPC1-7):F17C13/00 主分类号 B01J4/00
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