发明名称 |
Purgeable container for low vapor pressure chemicals |
摘要 |
A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.
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申请公布号 |
US6966348(B2) |
申请公布日期 |
2005.11.22 |
申请号 |
US20030669942 |
申请日期 |
2003.09.24 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
STEIDL THOMAS ANDREW;VIVANCO GILDARDO;BIRTCHER CHARLES MICHAEL |
分类号 |
B01J4/00;B08B9/00;B67D99/00;C23C16/44;C23C16/455;F16K11/10;F17C13/04;H01L21/02;H01L21/205;H01L21/304;(IPC1-7):F17C13/00 |
主分类号 |
B01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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