| 摘要 |
<P>PROBLEM TO BE SOLVED: To search for detection errors, originating only with the characteristics of each mark detection system between two or more mark detection systems. <P>SOLUTION: While managing the position coordinate on the coordinate system at rest of a substrate W2, and the position coordinate on the coordinate system at rest of detection reference points SXa, SXb of mark detection systems 24a, 24b, the positional relation of the marks and the detection reference points of the mark detection systems formed on the substrate is detected respectively by the first mark detection system 24a and the second mark detection system 24b. Namely, the position coordinate on the coordinate system at rest of a mark, and furthermore, the position of the mark on the substrate are to be detected by each mark detection system. Thus, by comparing the position of the same mark formed on the same board, it is made possible to search for the detection error caused by only the characteristics of each mark detection system, without receiving the influence due to the substrate and marks. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
