| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical system assembling/adjusting method for accurately, simply, and inexpensively performing wavefront aberration adjustment on an optical system. <P>SOLUTION: This assembling/adjusting method for an optical system comprising a plurality of optical elements each having a multilayer film, is provided with: a first measurement step for finding a difference between phase distribution of EUV light reflected by the optical elements and phase distribution of visible light reflected by the optical elements on each of the plurality of optical elements; a second measurement step for calculating phase distribution of the visible light passing through the optical system; a determination step for determining phase distribution of the EUV light passing through the optical system based on the difference found on the first measurement step and on the phase distribution measured on the second measurement step; and a step for adjusting the position and/or posture of each of the optical elements based on the phase distribution determined on the determination step. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
