| 摘要 |
PROBLEM TO BE SOLVED: To enable the front face and the rear face of a sheet-like object to be processed, to be cleaned by the same device. SOLUTION: A thin-sheet rotary processor includes an upper processing cup 20 and a lower processing cup 30 for pinching and processing the object (10) to be processed, an upper processing cup push-up mechanism 50 for raising the upper processing cup, when the object is mounted, a coupling mechanism (22) for integrally coupling the upper processing cup lowered, after the object has been mounted with the lower processing cup, and a rotating mechanism 70 for rotating a rotary processing part, including the upper and lower processing cups. COPYRIGHT: (C)2006,JPO&NCIPI
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