Acceleration switch

摘要

An acceleration switch and method therefor includes providing a conductive substrate (10) and an insulating cap (16). A recessed area is formed in the insulating cap (16). An insulating layer (12) is disposed on the substrate (10). A conductive layer (14) is disposed on the insulating layer (12). The conductive layer (14) is etched to form a cantilever beam (34) and an electrically isolated island (40). The insulating layer (12) is etched around the cantilever beam (34) to free the cantilever beam (34) to move. Contacts are disposed on the cantilever beam (34) and in the recessed area such that the contacts are able to electrically contact each other upon application of an acceleration to the switch. The cap (16) is bonded to the conductive layer (14) to hermetically seal the cantilever beam (34). <IMAGE>