| 摘要 |
A metal compound having a metal radical containing one or more metals, and a radical containing hydrogen and one or more of the elements C, N, O and B is thermally decomposed in the presence of a substrate to form a coating of a metal oxide, nitride carbide or boride on the substrate. In one embodiment of the invention, the metal compound is entrained in a supersonic molecular beam which, upon impact with the surface to be coated, thermally decomposes, forming a refractory metal coating and gaseous by-products.
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