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发明名称
Method for filling inter-metallic dielectric
摘要
申请公布号
KR100527866(B1)
申请公布日期
2005.11.15
申请号
KR20030076499
申请日期
2003.10.30
申请人
发明人
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
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