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发明名称
VERFAHREN UND VORRICHTUNG ZUM BONDEN UND DEBONDEN VON SYSTEMWAFERN AUF TRÄGERWAFERN
摘要
申请公布号
AT308800(T)
申请公布日期
2005.11.15
申请号
AT20020014551T
申请日期
2002.07.01
申请人
INFINEON TECHNOLOGIES AG
发明人
HELLMUND, OLIVER;VON KOBLINSKI, CARSTEN, DR.
分类号
H01L21/00;H01L21/687;(IPC1-7):H01L21/68
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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