发明名称 VERFAHREN UND VORRICHTUNG ZUM RILLEN VON POLIERKISSEN
摘要 <p>Grooves are formed in a COD pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s).</p>
申请公布号 AT307006(T) 申请公布日期 2005.11.15
申请号 AT20010952272T 申请日期 2001.06.27
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHEN, SHYNG-TSONG;CHUNG, ALEX, SIU, KEUNG;DAVIS, KENNETH, M.;HSU, OSCAR, KAI, CHI;RODBELL, KENNETH, P.
分类号 B24B37/26;B24D13/14;H01L21/304;(IPC1-7):B24B1/00;B23C3/28;B24B37/04;B24D18/00;B26D7/01 主分类号 B24B37/26
代理机构 代理人
主权项
地址